10.23642/USN.26130904
Bouchouri Angelos
https://orcid.org/0009-0004-0590-4348
University of South-Eastern Norway
Supplementary Data for: Optimization of grayscale lithography for the fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers
DataverseNO
2024
Other
grayscale lithography
infrared imaging systems
fresnel lenses
reactive ion etching conditions
University of South-Eastern Norway
University of South-Eastern Norway
USN Research Data Support
University of South-Eastern Norway
2024-07-03
2024-07-03
10.3390/MI15070866
10.23642/USN.26130904/DBIVLM
10.23642/USN.26130904/3URHJF
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Creative Commons Attribution 4.0 International License.
DATASET MIGRATED FROM FIGSHARE: <p dir="ltr">Images and data acquired during the experiment and presented in the article.</p>
Norwegian Micro- and Nano-Fabrication Facility (NORFAB)