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Supplementary Data for: Optimization of grayscale lithography for the fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers
Jul 3, 2024
Bouchouri Angelos, 2024, "Supplementary Data for: Optimization of grayscale lithography for the fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers", https://doi.org/10.23642/USN.26130904, DataverseNO, V1
DATASET MIGRATED FROM FIGSHARE: Images and data acquired during the experiment and presented in the article.
47332513_SF6_selectivity.csv
Jul 3, 2024 - Supplementary Data for: Optimization of grayscale lithography for the fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers
Comma Separated Values - 1.1 KB - MD5: d3ff99bfe390dfb7130f390fab10dab7
47332513_SF6_selectivity.csv
47332516_PR_ramps_Comparison.csv
Jul 3, 2024 - Supplementary Data for: Optimization of grayscale lithography for the fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers
Comma Separated Values - 137.5 KB - MD5: 176cd5a5be28162a2d6b2bf163967dee
47332516_PR_ramps_Comparison.csv
47332519_O2_selectivity.csv
Jul 3, 2024 - Supplementary Data for: Optimization of grayscale lithography for the fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers
Comma Separated Values - 1.0 KB - MD5: 78ba4d9e54a53c14453716b007606f28
47332519_O2_selectivity.csv
figure 10.a.jpg
figure 10.a.jpg
Jul 3, 2024 - Supplementary Data for: Optimization of grayscale lithography for the fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers
JPEG Image - 1.5 MB - MD5: 6de86a57c3cef7e43097c31afe7aa770
figure 10.a.jpg
figure 10.b.png
figure 10.b.png
Jul 3, 2024 - Supplementary Data for: Optimization of grayscale lithography for the fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers
PNG Image - 630.0 KB - MD5: f578b030034963816b8bda205d1dee0e
figure 10.b.png
figure 11.a.jpg
figure 11.a.jpg
Jul 3, 2024 - Supplementary Data for: Optimization of grayscale lithography for the fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers
JPEG Image - 2.7 MB - MD5: 10c20fca6d4bbd39c8d5f72c7dbb4264
figure 11.a.jpg
figure 11.b.jpg
figure 11.b.jpg
Jul 3, 2024 - Supplementary Data for: Optimization of grayscale lithography for the fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers
JPEG Image - 2.3 MB - MD5: e587859a45729b78ea87b68024d29f7c
figure 11.b.jpg
figure 11.c.jpg
figure 11.c.jpg
Jul 3, 2024 - Supplementary Data for: Optimization of grayscale lithography for the fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers
JPEG Image - 806.5 KB - MD5: 200bf7b62a2d2abd3c77520527480ea7
figure 11.c.jpg
figure 12.a.jpg
Jul 3, 2024 - Supplementary Data for: Optimization of grayscale lithography for the fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers
JPEG Image - 2.9 MB - MD5: 232d52eea6f53e5e7236505df2170383
figure 12.a.jpg
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